Invention Grant
- Patent Title: Semiconductor device
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Application No.: US14272759Application Date: 2014-05-08
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Publication No.: US09324871B2Publication Date: 2016-04-26
- Inventor: Shunpei Yamazaki , Hiroyuki Miyake , Kenichi Okazaki , Masahiko Hayakawa , Shinpei Matsuda
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Kanagawa-ken
- Agency: Robinson Intellectual Property Law Office
- Agent Eric J. Robinson
- Priority: JP2013-103716 20130516
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/49 ; H01L27/12

Abstract:
A semiconductor device including a transistor having excellent electrical characteristics is provided. Alternatively, a semiconductor device having a high aperture ratio and including a capacitor capable of increasing capacitance is provided. The semiconductor device includes a gate electrode, an oxide semiconductor film overlapping the gate electrode, an oxide insulating film in contact with the oxide semiconductor film, a first oxygen barrier film between the gate electrode and the oxide semiconductor film, and a second oxygen barrier film in contact with the first oxygen barrier film. The oxide semiconductor film and the oxide insulating film are provided on an inner side of the first oxygen barrier film and the second oxygen barrier film.
Public/Granted literature
- US09437741B2 Semiconductor device Public/Granted day:2016-09-06
Information query
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