Invention Grant
US09324873B2 Fabricating method of thin film transistor, thin film transistor and display panel
有权
薄膜晶体管,薄膜晶体管和显示面板的制造方法
- Patent Title: Fabricating method of thin film transistor, thin film transistor and display panel
- Patent Title (中): 薄膜晶体管,薄膜晶体管和显示面板的制造方法
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Application No.: US14421931Application Date: 2014-04-25
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Publication No.: US09324873B2Publication Date: 2016-04-26
- Inventor: Jing Li , Zhenyu Xie , Xu Chen , Wenyu Zhang , Da Xu
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Applicant Address: CN Beijing CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Beijing CN Beijing
- Agency: Ladas & Parry LLP
- Priority: CN201310745564 20131230
- International Application: PCT/CN2014/076195 WO 20140425
- International Announcement: WO2015/100887 WO 20150709
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/20 ; H01L27/092 ; H01L29/786 ; H01L21/02 ; H01L29/66 ; H01L21/311

Abstract:
Embodiments of the invention provide a fabricating method a thin film transistor, a thin film transistor and a display panel, so as to improve carrier mobility in the polycrystalline silicon. The fabricating method a thin film transistor comprises following M1, depositing an inducing layer on a substrate; M2, etching a recess in the inducing layer by an etching process, the recess having an edge with a prescribed shape; M3, depositing an amorphous silicon layer in the recess having an edge with a prescribed shape, and inducing the amorphous silicon layer to form a polycrystalline silicon layer by crystallization method, polycrystalline silicon grains in the polycrystalline silicon layer arranging in a direction vertical to the edge of the recess by the limitation of the edge of the recess, and the polycrystalline silicone layer and the inducing layer together forming a semiconductor layer; and M4, forming a gate insulating layer, a gate, a passivation layer and a source and a drain connecting with the semiconductor layer sequentially on the semiconductor layer.
Public/Granted literature
- US20160035901A1 FABRICATING METHOD OF THIN FILM TRANSISTOR, THIN FILM TRANSISTOR AND DISPLAY PANEL Public/Granted day:2016-02-04
Information query
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