Invention Grant
- Patent Title: Thin film transistor
- Patent Title (中): 薄膜晶体管
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Application No.: US14721779Application Date: 2015-05-26
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Publication No.: US09324882B2Publication Date: 2016-04-26
- Inventor: Hiroshi Goto , Aya Miki , Tomoya Kishi , Kenta Hirose , Shinya Morita , Toshihiro Kugimiya , Byung Du Ahn , Gun Hee Kim , Yeon Hong Kim
- Applicant: Kobe Steel, Ltd. , Samsung Display Co., Ltd
- Applicant Address: JP Kobe-shi KR Yongin
- Assignee: Kobe Steel, Ltd.,Samsung Display Co., Ltd.
- Current Assignee: Kobe Steel, Ltd.,Samsung Display Co., Ltd.
- Current Assignee Address: JP Kobe-shi KR Yongin
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2012-129399 20120606
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L27/12 ; H01L21/02 ; C23C14/08 ; H01L29/24

Abstract:
A thin film transistor containing at least, a gate electrode, a gate insulating film, an oxide semiconductor layer, source-drain electrode and a passivation film, in this order on a substrate. The oxide semiconductor layer is a laminate containing a first oxide semiconductor layer (IGZTO) and a second oxide semiconductor layer (IZTO). The second oxide semiconductor layer is formed on the gate insulating film, and the first oxide semiconductor layer is formed between the second oxide semiconductor layer and the passivation film. The contents of respective metal elements relative to the total amount of all the metal elements other than oxygen in the first oxide semiconductor layer are as follows; Ga: 8% or more and 30% or less; In: 25% or less, excluding 0%; Zn: 35% or more to 65% or less; and Sn: 5% or more to 30% or less.
Public/Granted literature
- US20160099357A2 THIN FILM TRANSISTOR Public/Granted day:2016-04-07
Information query
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