Invention Grant
US09324934B2 Piezoelectric thin film, piezoelectric element, ink-jet head, and ink-jet printer 有权
压电薄膜,压电元件,喷墨头和喷墨打印机

Piezoelectric thin film, piezoelectric element, ink-jet head, and ink-jet printer
Abstract:
A piezoelectric thin film which is of a perovskite type having a tetragonal crystal structure, the tetragonal crystal having a degree of (100) orientation of 80% or higher. The piezoelectric thin film is constituted of a lead lanthanum zirconate titanate (PLZT) which is a lead zirconate titanate (PZT) in which some of the lead has been replaced with lanthanum.
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