Invention Grant
- Patent Title: Photonic devices and methods of using and making photonic devices
- Patent Title (中): 光子器件和使用和制造光子器件的方法
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Application No.: US14200427Application Date: 2014-03-07
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Publication No.: US09325140B2Publication Date: 2016-04-26
- Inventor: Purnawirman Purnawirman , Michael R. Watts , Ehsan Shah Hosseini , Jonathan D. B. Bradley , Jie Sun , Matteo Cherchi
- Applicant: Purnawirman Purnawirman , Michael R. Watts , Ehsan Shah Hosseini , Jonathan D. B. Bradley , Jie Sun , Matteo Cherchi
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Agency: Cooley LLP
- Main IPC: H01S3/063
- IPC: H01S3/063 ; H01S3/17 ; H01S3/08 ; H01S3/083 ; H01S3/094 ; H01S3/16 ; H01S3/23 ; H01S3/105

Abstract:
Examples of the present invention include integrated erbium-doped waveguide lasers designed for silicon photonic systems. In some examples, these lasers include laser cavities defined by distributed Bragg reflectors (DBRs) formed in silicon nitride-based waveguides. These DBRs may include grating features defined by wafer-scale immersion lithography, with an upper layer of erbium-doped aluminum oxide deposited as the final step in the fabrication process. The resulting inverted ridge-waveguide yields high optical intensity overlap with the active medium for both the 980 nm pump (89%) and 1.5 μm laser (87%) wavelengths with a pump-laser intensity overlap of over 93%. The output powers can be 5 mW or higher and show lasing at widely-spaced wavelengths within both the C- and L-bands of the erbium gain spectrum (1536, 1561 and 1596 nm).
Public/Granted literature
- US20140269800A1 PHOTONIC DEVICES AND METHODS OF USING AND MAKING PHOTONIC DEVICES Public/Granted day:2014-09-18
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