Invention Grant
- Patent Title: Resonator element, resonator, and oscillator
- Patent Title (中): 谐振器元件,谐振器和振荡器
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Application No.: US14284850Application Date: 2014-05-22
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Publication No.: US09325278B2Publication Date: 2016-04-26
- Inventor: Akinori Yamada
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2010-156577 20100709
- Main IPC: H03H9/215
- IPC: H03H9/215 ; H03B5/30 ; H03H9/02 ; H03H9/05 ; H03H9/10 ; H03H9/21

Abstract:
A resonator element includes: at least one resonating arm extending, wherein the resonating arm has a mechanical resonance frequency which is higher than a thermal relaxation frequency thereof, the resonating arm has a groove portion, the groove portion includes a bottom portion, a first side surface that extends along the longitudinal direction of the resonating arm and comes into contact with the opened principal surface and the bottom portion, and a second side surface that faces the first side surface with the bottom portion disposed therebetween and comes into contact with the opened principal surface and the bottom portion, and the groove portion has a non-electrode region which extends from a part of the first side surface close to the bottom portion to a part of the second side surface close to the bottom portion and in which no electrode is provided.
Public/Granted literature
- US20140253254A1 RESONATOR ELEMENT, RESONATOR, AND OSCILLATOR Public/Granted day:2014-09-11
Information query
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