Invention Grant
US09327382B2 Carrier for a double-side polishing apparatus, double-side polishing apparatus using this carrier, and double-side polishing method 有权
用于双面抛光装置的载体,使用该载体的双面抛光装置和双面抛光方法

Carrier for a double-side polishing apparatus, double-side polishing apparatus using this carrier, and double-side polishing method
Abstract:
A carrier for a double-side polishing apparatus comprising at least: a metallic carrier base that is arranged between upper and lower turn tables having polishing pads attached thereto and has a holding hole formed therein to hold a wafer sandwiched between the upper and lower turn tables at the time of polishing; and a ring-like resin insert that is arranged along an inner peripheral portion of the holding hole of the carrier base and is in contact with a peripheral portion of the held wafer, wherein an inner peripheral end portion of the holding hole of the carrier base has an upwardly opening tapered surface, an outer peripheral portion of the ring-like insert has a reverse tapered surface with respect to the tapered surface of the holding hole of the carrier base, and the resin insert is fitted in the holding hole of the carrier base through the tapered surface.
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