Invention Grant
- Patent Title: Carrier for a double-side polishing apparatus, double-side polishing apparatus using this carrier, and double-side polishing method
- Patent Title (中): 用于双面抛光装置的载体,使用该载体的双面抛光装置和双面抛光方法
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Application No.: US12863674Application Date: 2009-02-16
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Publication No.: US09327382B2Publication Date: 2016-05-03
- Inventor: Junichi Ueno , Kazuya Sato , Syuichi Kobayashi
- Applicant: Junichi Ueno , Kazuya Sato , Syuichi Kobayashi
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2008-045479 20080227
- International Application: PCT/JP2009/000592 WO 20090216
- International Announcement: WO2009/107333 WO 20090903
- Main IPC: B24B37/04
- IPC: B24B37/04 ; B24B37/08 ; B24B37/28 ; B24B37/32

Abstract:
A carrier for a double-side polishing apparatus comprising at least: a metallic carrier base that is arranged between upper and lower turn tables having polishing pads attached thereto and has a holding hole formed therein to hold a wafer sandwiched between the upper and lower turn tables at the time of polishing; and a ring-like resin insert that is arranged along an inner peripheral portion of the holding hole of the carrier base and is in contact with a peripheral portion of the held wafer, wherein an inner peripheral end portion of the holding hole of the carrier base has an upwardly opening tapered surface, an outer peripheral portion of the ring-like insert has a reverse tapered surface with respect to the tapered surface of the holding hole of the carrier base, and the resin insert is fitted in the holding hole of the carrier base through the tapered surface.
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