Invention Grant
US09327964B2 Method for manufacturing a die assembly having a small thickness and die assembly relating thereto 有权
具有小厚度的模具组件的制造方法和与其相关的模具组件

Method for manufacturing a die assembly having a small thickness and die assembly relating thereto
Abstract:
A method for manufacturing a die assembly, including the steps of: bonding a first wafer of semiconductor material to a second wafer, the second wafer including a respective semiconductor body having a respective initial thickness and forming an integrated electronic circuit; and subsequently reducing the initial thickness of the semiconductor body of the second wafer; and subsequently bonding the second wafer to a third wafer, the third wafer forming a micro-electromechanical sensing structure.
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