Invention Grant
US09327964B2 Method for manufacturing a die assembly having a small thickness and die assembly relating thereto
有权
具有小厚度的模具组件的制造方法和与其相关的模具组件
- Patent Title: Method for manufacturing a die assembly having a small thickness and die assembly relating thereto
- Patent Title (中): 具有小厚度的模具组件的制造方法和与其相关的模具组件
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Application No.: US14524661Application Date: 2014-10-27
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Publication No.: US09327964B2Publication Date: 2016-05-03
- Inventor: Giorgio Allegato , Marco Ferrera , Matteo Garavaglia , Lorenzo Corso
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Priority: ITTO2013A0889 20131031
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B81C1/00

Abstract:
A method for manufacturing a die assembly, including the steps of: bonding a first wafer of semiconductor material to a second wafer, the second wafer including a respective semiconductor body having a respective initial thickness and forming an integrated electronic circuit; and subsequently reducing the initial thickness of the semiconductor body of the second wafer; and subsequently bonding the second wafer to a third wafer, the third wafer forming a micro-electromechanical sensing structure.
Public/Granted literature
- US20150115378A1 METHOD FOR MANUFACTURING A DIE ASSEMBLY HAVING A SMALL THICKNESS AND DIE ASSEMBLY RELATING THERETO Public/Granted day:2015-04-30
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