Invention Grant
US09327967B2 Micro-electro-mechanical transducer having an optimized non-flat surface 有权
具有优化的非平坦表面的微机电传感器

Micro-electro-mechanical transducer having an optimized non-flat surface
Abstract:
A capacitive micromachined ultrasound transducer (cMUT) and fabrication method of the same are provided. The cMUT has a substrate, a curved membrane disposed on top of the substrate, and a flexible membrane disposed on top of the curved membrane. The curved membrane has a raised portion which is higher than a recessed portion relative to the substrate, and is supported by a support standing on a major surface of the substrate. The flexible membrane includes a first region mounted to the raised portion of the curved membrane, and a second region extending over the recessed portion of the curved member. Methods for fabricating the cMUT are also disclosed.
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