Invention Grant
- Patent Title: Micro-electro-mechanical transducer having an optimized non-flat surface
- Patent Title (中): 具有优化的非平坦表面的微机电传感器
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Application No.: US14642306Application Date: 2015-03-09
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Publication No.: US09327967B2Publication Date: 2016-05-03
- Inventor: Yongli Huang
- Applicant: Kolo Technologies, Inc.
- Applicant Address: US CA San Jose
- Assignee: Kolo Technologies, Inc.
- Current Assignee: Kolo Technologies, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Mattingly & Malur, P.C.
- Main IPC: H03H7/00
- IPC: H03H7/00 ; H03H7/01 ; H03H3/007 ; H03H9/02 ; H03H9/24 ; H03H9/46 ; B81C1/00 ; H02N1/00 ; B81B3/00 ; H04R19/00

Abstract:
A capacitive micromachined ultrasound transducer (cMUT) and fabrication method of the same are provided. The cMUT has a substrate, a curved membrane disposed on top of the substrate, and a flexible membrane disposed on top of the curved membrane. The curved membrane has a raised portion which is higher than a recessed portion relative to the substrate, and is supported by a support standing on a major surface of the substrate. The flexible membrane includes a first region mounted to the raised portion of the curved membrane, and a second region extending over the recessed portion of the curved member. Methods for fabricating the cMUT are also disclosed.
Public/Granted literature
- US20150181348A1 MICRO-ELECTRO-MECHANICAL TRANSDUCER HAVING AN OPTIMIZED NON-FLAT SURFACE Public/Granted day:2015-06-25
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