Invention Grant
- Patent Title: Vitreous silica crucible for pulling silicon single crystal, and method for manufacturing the same
- Patent Title (中): 用于拉硅单晶的玻璃状硅石坩埚及其制造方法
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Application No.: US13106993Application Date: 2011-05-13
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Publication No.: US09328009B2Publication Date: 2016-05-03
- Inventor: Toshiaki Sudo , Hiroshi Kishi , Eriko Suzuki
- Applicant: Toshiaki Sudo , Hiroshi Kishi , Eriko Suzuki
- Applicant Address: JP Tokyo
- Assignee: SUMCO CORPORATION
- Current Assignee: SUMCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Law Office of Katsuhiro Arai
- Main IPC: C30B15/02
- IPC: C30B15/02 ; C03B19/09 ; C30B11/00 ; C30B29/06 ; C30B35/00

Abstract:
Provided is a vitreous silica crucible for pulling a silicon single crystal, which stably suppresses surface vibration of a silicon melted solution filled therein and has a long life, and a method for manufacturing the same. The vitreous silica crucible for pulling a silicon single crystal includes a peripheral wall portion, a curved portion, and a bottom portion, wherein a plurality of minute concave portions are formed on a certain area of an inner surface of the peripheral wall portion, and a plurality of bubbles are formed on a lower position of the minute concave portions.
Public/Granted literature
- US20120285372A1 VITREOUS SILICA CRUCIBLE FOR PULLING SILICON SINGLE CRYSTAL, AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2012-11-15
Information query
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