Invention Grant
US09328009B2 Vitreous silica crucible for pulling silicon single crystal, and method for manufacturing the same 有权
用于拉硅单晶的玻璃状硅石坩埚及其制造方法

Vitreous silica crucible for pulling silicon single crystal, and method for manufacturing the same
Abstract:
Provided is a vitreous silica crucible for pulling a silicon single crystal, which stably suppresses surface vibration of a silicon melted solution filled therein and has a long life, and a method for manufacturing the same. The vitreous silica crucible for pulling a silicon single crystal includes a peripheral wall portion, a curved portion, and a bottom portion, wherein a plurality of minute concave portions are formed on a certain area of an inner surface of the peripheral wall portion, and a plurality of bubbles are formed on a lower position of the minute concave portions.
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