The invention relates to a process for the preparation of isocyanates by reaction of the corresponding amines with phosgene in the gas phase, wherein a diluent containing between 90.0000% by weight and 99.9999% by weight of substances which are inert in the phosgenation process and between 0.0001% by weight and 10.0000% by weight of oxygen is present during the conversion of the amine into the gas phase and the molar ratio of amine to oxygen (O2) is ≧1,000:1.