Invention Grant
US09328847B2 Arrangement having at least one valve 有权
具有至少一个阀的布置

Arrangement having at least one valve
Abstract:
An arrangement having at least one valve, in particular a vacuum valve, with a closure member of the valve for closing a through-opening of the valve and a drive for adjusting the closure member between a closed position, in which the closure member closes the through-opening, and at least one open position, in which the closure member opens the through-opening at least in regions. For the thermal loading of the closure member, the valve has a chamber for a heat transfer fluid, connected in a thermally conducting manner to the closure member and closed off, preferably permanently, in relation to the through-opening. A supply line of the arrangement opens into the chamber, supplying heat transfer fluid for the thermal loading of the closure member to the chamber. At least one heat exchanger for the thermal loading of the heat transfer fluid is arranged in the supply line.
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