A microvalve includes a base plate having a surface defining an actuator cavity. A venting groove extends from a first cavity portion of the actuator cavity having a dead end region to a second cavity portion of the actuator cavity having a structure that can vent air from the microvalve. A cover plate includes a surface having an actuator cavity provided therein that includes a first cavity portion having a dead end region and a second cavity portion having a structure that can vent air from the microvalve. An intermediate plate includes a displaceable member that is disposed within the actuator cavity for movement between a closed position, wherein the displaceable member prevents fluid communication through the microvalve, and an opened position, wherein the displaceable member does not prevent fluid communication through the microvalve.