Invention Grant
- Patent Title: Angular velocity sensor and method of manufacture
- Patent Title (中): 角速度传感器及其制造方法
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Application No.: US13608480Application Date: 2012-09-10
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Publication No.: US09329040B2Publication Date: 2016-05-03
- Inventor: Fumio Ichikawa
- Applicant: Fumio Ichikawa
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2011-209632 20110926
- Main IPC: G01C19/00
- IPC: G01C19/00 ; G01C19/5628 ; G01C19/5642

Abstract:
A sensor element has drive vibrating arms drive-vibrating by energization, adjustment vibrating arms vibrating with the drive vibrations of the drive vibrating arms, detection electrodes outputting charge in response to physical quantities applied to the drive vibrating arms, first electrodes provided on the adjustment vibrating arms, electrically connected to the detection electrodes, and outputting charge with the vibrations of the adjustment vibrating arms, and a pair of second electrodes provided on the adjustment vibrating arms, electrically connected to a pair of detection electrodes, and outputting charge having an opposite polarity to that of the first electrodes with the vibrations of the adjustment vibrating arms.
Public/Granted literature
- US20130074597A1 SENSOR ELEMENT, MANUFACTURING METHOD OF SENSOR ELEMENT, SENSOR DEVICE, AND ELECTRONIC APPARATUS Public/Granted day:2013-03-28
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