Invention Grant
- Patent Title: MEMS tilt sensor
- Patent Title (中): MEMS倾斜传感器
-
Application No.: US13705722Application Date: 2012-12-05
-
Publication No.: US09329199B2Publication Date: 2016-05-03
- Inventor: Sung Bok Lee , Eric J. Lautenschlager
- Applicant: Knowles Electronics, LLC
- Applicant Address: US IL Itasca
- Assignee: KNOWLES ELECTRONICS, LLC
- Current Assignee: KNOWLES ELECTRONICS, LLC
- Current Assignee Address: US IL Itasca
- Agency: Fitch, Even, Tabin & Flannery LLP
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01C9/06 ; G01C9/14 ; H04R3/00 ; G01P15/08 ; H04R19/00 ; H04R31/00

Abstract:
An acoustic sensor includes a back plate; at least one back plate electrode coupled to the back plate; a proof of mass with the proof of mass elastically coupled to the back plate; and a proof of mass electrode coupled to the proof of mass. Movement of the sensor causes a capacitance between the proof of mass electrode and the at least one back plate electrode to vary and the capacitance represents a magnitude of the movement of the sensor.
Public/Granted literature
- US20130160547A1 MEMS Tilt Sensor Public/Granted day:2013-06-27
Information query
IPC分类: