Invention Grant
- Patent Title: Calibration of a mechanical property of SPM cantilevers
- Patent Title (中): 校准SPM悬臂的机械性能
-
Application No.: US14389933Application Date: 2013-03-22
-
Publication No.: US09329202B2Publication Date: 2016-05-03
- Inventor: Hamed Sadeghian Marnani
- Applicant: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Applicant Address: NL Delft
- Assignee: NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
- Current Assignee: NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
- Current Assignee Address: NL Delft
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Priority: EP12162847 20120402
- International Application: PCT/NL2013/050210 WO 20130322
- International Announcement: WO2013/151425 WO 20131010
- Main IPC: G01Q40/00
- IPC: G01Q40/00 ; B81C99/00 ; B82Y35/00 ; G01N29/036 ; G01N29/30

Abstract:
A method is presented for calibrating a cantilever, such as a scanning probe microscope cantilever (SPM cantilever). The cantilever to be calibrated comprises at least a first and a second layer having a mutually different thermal expansion coefficient, the method comprising the steps of: controllably causing a temperature distribution along the cantilever, measuring a spatial state of the cantilever, computing a mechanical property from the observed spatial state caused by controllably changing the temperature. Also a calibration arrangement and a scanning probe microscope provided with the calibration arrangement are presented.
Public/Granted literature
- US20150293145A1 CALIBRATION OF A MECHANICAL PROPERTY OF SPM CANTILEVERS Public/Granted day:2015-10-15
Information query