Invention Grant
US09329222B2 Test device and test system of semiconductor device and test method for testing semiconductor device
有权
半导体器件的测试装置和测试系统以及半导体器件的测试方法
- Patent Title: Test device and test system of semiconductor device and test method for testing semiconductor device
- Patent Title (中): 半导体器件的测试装置和测试系统以及半导体器件的测试方法
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Application No.: US13716527Application Date: 2012-12-17
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Publication No.: US09329222B2Publication Date: 2016-05-03
- Inventor: Sug-Jun Kwak
- Applicant: SK hynix Inc.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK Hynix Inc.
- Current Assignee: SK Hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2012-0050388 20120511
- Main IPC: G01R31/02
- IPC: G01R31/02 ; G01R31/04 ; G01R1/067 ; G11C29/12 ; G11C29/48 ; G11C29/50
Abstract:
A test device of a semiconductor device for testing a semiconductor device including a plurality of interface pads includes a plurality of coupling units, each configured to be coupled to a corresponding one of the plurality of interface pads, a channel configured to be coupled to the plurality of coupling units, a voltage generating unit configured to generate a test voltage applied to the channel, and a current measuring unit configured to measure a current that flows on the channel in response to the test voltage.
Public/Granted literature
- US20130300450A1 TEST DEVICE AND TEST SYSTEM OF SEMICONDUCTOR DEVICE AND TEST METHOD FOR TESTING SEMICONDUCTOR DEVICE Public/Granted day:2013-11-14
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