Invention Grant
- Patent Title: Actuator having two piezoelectric elements on a membrane
- Patent Title (中): 致动器在膜上具有两个压电元件
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Application No.: US14504100Application Date: 2014-10-01
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Publication No.: US09329360B2Publication Date: 2016-05-03
- Inventor: Thor Bakke , Ib-Rune Johansen , Andreas Vogl , Frode Tyholdt , Dag Thorstein Wang
- Applicant: SINTEF
- Applicant Address: NO Trondheim
- Assignee: SINTEF
- Current Assignee: SINTEF
- Current Assignee Address: NO Trondheim
- Agency: Winstead PC
- Priority: NO20093022 20090918
- Main IPC: H01L41/18
- IPC: H01L41/18 ; G02B7/182 ; G02B26/00 ; G02B26/08 ; H01L41/09 ; H01L41/187
Abstract:
The present invention relates to an actuator for moving a rigid element, e.g. an optical element such as mirror, the element being mechanically coupled to a frame with a bendable coupling, wherein actuator elements are mounted on said coupling between the frame and element, the coupling and actuator elements being adapted to provide a movement to the element when subject to signal from a signal generator.
Public/Granted literature
- US20150109650A1 ACTUATOR FOR MOVING A MICRO MECHANICAL ELEMENT Public/Granted day:2015-04-23
Information query
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