Invention Grant
- Patent Title: Imaging apparatus
- Patent Title (中): 成像设备
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Application No.: US13488601Application Date: 2012-06-05
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Publication No.: US09329376B2Publication Date: 2016-05-03
- Inventor: Yoshinari Higaki , Miyoko Kawashima , Toshihiko Tsuji
- Applicant: Yoshinari Higaki , Miyoko Kawashima , Toshihiko Tsuji
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2011-138704 20110622; JP2012-108654 20120510
- Main IPC: G02B21/36
- IPC: G02B21/36 ; H04N5/357 ; G02B27/00 ; G02B13/18

Abstract:
An imaging apparatus comprises: an imaging unit having an imaging optical system and an imaging device; a measuring unit that measures, for each of a plurality of regions on a specimen, an optical aberration or a physical quantity causing the aberration before the imaging of the specimen is performed; a plurality of optical elements that are inserted in an optical path of the imaging optical system for correcting the aberration and that differ in correction amount; and a control unit that selects an optical element from among the optical elements on the basis of a measurement result of the measuring unit, and inserts the selected optical element into the optical path of the imaging optical system before the imaging of the specimen. The imaging optical system is configured to be capable of forming simultaneously images of the plurality of regions on the imaging device.
Public/Granted literature
- US20120327208A1 IMAGING APPARATUS Public/Granted day:2012-12-27
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