Invention Grant
- Patent Title: Material quality, suspended material structures on lattice-mismatched substrates
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Application No.: US14512158Application Date: 2014-10-10
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Publication No.: US09330907B2Publication Date: 2016-05-03
- Inventor: Robert Chen , James S. Harris, Jr. , Suyog Gupta
- Applicant: The Board of Trustees of the Leland Stanford Junior University
- Applicant Address: US CA Palo Alto
- Assignee: The Board of Trustees of the Leland Stanford Junior University
- Current Assignee: The Board of Trustees of the Leland Stanford Junior University
- Current Assignee Address: US CA Palo Alto
- Agency: Lumen Patent Firm
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/00 ; H01L29/161 ; B82Y10/00 ; B82Y40/00 ; H01L29/06 ; H01S5/34 ; H01L21/3065 ; B81C1/00 ; H01S5/10
Abstract:
Suspended structures are provided using selective etch technology. Such structures can be protected on all sides when the selective undercut etch is performed, thereby providing excellent control of feature geometry combined with superior material quality.
Public/Granted literature
- US20150102465A1 Material quality, suspended material structures on lattice-mismatched substrates Public/Granted day:2015-04-16
Information query
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