Invention Grant
US09330948B2 Heater unit, fan filter unit, and substrate processing apparatus
有权
加热单元，风扇过滤器单元和基板处理装置
- Patent Title: Heater unit, fan filter unit, and substrate processing apparatus
- Patent Title (中): 加热单元，风扇过滤器单元和基板处理装置
-
Application No.: US13529404Application Date: 2012-06-21
-
Publication No.: US09330948B2Publication Date: 2016-05-03
- Inventor: Masaaki Furuya , Munenori Iwami , Takahiko Wakatsuki , Masanori Kondo , Katsuya Yamada
- Applicant: Masaaki Furuya , Munenori Iwami , Takahiko Wakatsuki , Masanori Kondo , Katsuya Yamada
- Applicant Address: JP Yokohama-shi JP Tokyo
- Assignee: SHIBAURA MECHATRONICS CORPORATION,KABUSHIKI KAISHA TOSHIBA
- Current Assignee: SHIBAURA MECHATRONICS CORPORATION,KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Yokohama-shi JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P
- Priority: JPP2011-137060 20110621
- Main IPC: F27D11/00
- IPC: F27D11/00 ; H01L21/67 ; B01D46/10 ; B01D46/42 ; H05B3/28
Abstract:
A heater unit according to an embodiment includes: a flat heater including a linear heating element arranged in a planar pattern; a first mesh body formed in a mesh pattern using a material with high heat conductivity and placed at least on one side of the flat heater facing the flat heater; and a second mesh body formed in a mesh pattern using a material with lower heat conductivity than that of the first mesh body and placed to face a surface of the first mesh body opposite to the surface of the first mesh body facing the flat heater.
Public/Granted literature
- US20120325797A1 HEATER UNIT, FAN FILTER UNIT, AND SUBSTRATE PROCESSING APPARATUS Public/Granted day:2012-12-27
Information query
