Invention Grant
- Patent Title: Method for fabricating integrated circuits including contacts for metal resistors
- Patent Title (中): 包括金属电阻触点的集成电路的方法
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Application No.: US14195932Application Date: 2014-03-04
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Publication No.: US09330971B2Publication Date: 2016-05-03
- Inventor: Scott Beasor , Jagar Singh
- Applicant: GLOBALFOUNDRIES, Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Ingrassia Fisher & Lorenz, P.C.
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/48 ; H01L23/50 ; H01L27/06 ; H01L21/8234

Abstract:
Integrated circuits and methods for fabricating integrated circuits are provided. In one example, a method for fabricating an integrated circuit includes etching an ILD layer of dielectric material overlying a semiconductor substrate that includes a device region to form first contact vias that expose active areas of the device region. The ILD layer is etched to form second contact vias that correspondingly expose a gate that is disposed in the device region and a patterned resistive metal-containing layer that is disposed in the ILD layer adjacent to the device region. The first contact vias and the second contact vias are filled with an electrically-conductive material to form first contacts that are in electrical communication with the active areas and second contacts that include a gate contact and a metal resistor contact that are in electrical communication with the gate and the patterned resistive metal-containing layer, respectively.
Public/Granted literature
- US20150255335A1 INTEGRATED CIRCUITS INCLUDING CONTACTS FOR METAL RESISTORS AND METHODS FOR FABRICATING THE SAME Public/Granted day:2015-09-10
Information query
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