Invention Grant
US09330972B2 Methods of forming contact structures for semiconductor devices and the resulting devices
有权
形成用于半导体器件和所得器件的接触结构的方法
- Patent Title: Methods of forming contact structures for semiconductor devices and the resulting devices
- Patent Title (中): 形成用于半导体器件和所得器件的接触结构的方法
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Application No.: US14457708Application Date: 2014-08-12
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Publication No.: US09330972B2Publication Date: 2016-05-03
- Inventor: Ruilong Xie , Vimal Kamineni , William J. Taylor, Jr.
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/84 ; H01L21/425 ; H01L21/3205 ; H01L21/768 ; H01L23/535

Abstract:
One method disclosed herein includes, among other things, a method of forming a contact structure to a source/drain region of a transistor device. The transistor device includes a gate structure and a gate cap layer positioned above the gate structure. The method includes forming an extended-height epi contact structure that is conductively coupled to the source/drain region. The extended-height epi contact structure includes an upper surface that is positioned at a height level that is above a height level of an upper surface of the gate cap layer. The method further includes performing an etching process to trim at least a lateral width of a portion of the extended-height epi contact structure, and, after performing the etching process, forming a metal silicide material on at least a portion of the trimmed extended-height epi contact structure and forming a conductive contact on the metal silicide material.
Public/Granted literature
- US20160049332A1 METHODS OF FORMING CONTACT STRUCTURES FOR SEMICONDUCTOR DEVICES AND THE RESULTING DEVICES Public/Granted day:2016-02-18
Information query
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