Invention Grant
US09330986B2 Manufacturing method for solar cell and solar cell manufacturing system
有权
太阳能电池和太阳能电池制造系统的制造方法
- Patent Title: Manufacturing method for solar cell and solar cell manufacturing system
- Patent Title (中): 太阳能电池和太阳能电池制造系统的制造方法
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Application No.: US14233895Application Date: 2011-08-02
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Publication No.: US09330986B2Publication Date: 2016-05-03
- Inventor: Shoichi Karakida
- Applicant: Shoichi Karakida
- Applicant Address: JP Chiyoda-Ku, Tokyo
- Assignee: MITSUBISHI ELECTRIC CORPORATION
- Current Assignee: MITSUBISHI ELECTRIC CORPORATION
- Current Assignee Address: JP Chiyoda-Ku, Tokyo
- Agency: Buchanan Ingersoll & Rooney PC
- International Application: PCT/JP2011/067668 WO 20110802
- International Announcement: WO2013/018194 WO 20130207
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/66 ; H01L31/0236 ; H01L31/068 ; H01L31/18 ; G01R31/26

Abstract:
The invention includes: a first process of forming a texture structure on both surfaces of a semiconductor substrate of a first conductivity type; a second process of measuring a reflectance distribution of the both surfaces of the semiconductor substrate on which the texture structure is formed; a third process of forming an impurity diffusion layer, in which an impurity element of a second conductivity type is diffused, on one of the both surfaces of the semiconductor substrate which is narrower in the reflectance distribution; a fourth process of forming, on the impurity diffusion layer, a light receiving surface-side electrode having a predetermined pattern and electrically connected to the impurity diffusion layer; and a fifth process of forming a back surface-side electrode on another of the both surfaces of the semiconductor substrate which is wider in the reflectance distribution.
Public/Granted literature
- US20140162383A1 MANUFACTURING METHOD FOR SOLAR CELL AND SOLAR CELL MANUFACTURING SYSTEM Public/Granted day:2014-06-12
Information query
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