Invention Grant
- Patent Title: Semiconductor device
- Patent Title (中): 半导体器件
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Application No.: US14036304Application Date: 2013-09-25
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Publication No.: US09331008B2Publication Date: 2016-05-03
- Inventor: Motoharu Haga
- Applicant: ROHM CO., LTD.
- Applicant Address: JP Kyoto
- Assignee: ROHM CO., LTD.
- Current Assignee: ROHM CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Rabin & Berdo, P.C.
- Priority: JP2012-217584 20120928
- Main IPC: H01L23/498
- IPC: H01L23/498 ; H01L23/00

Abstract:
The semiconductor device of the present invention includes a semiconductor substrate provided with semiconductor elements, a lower layer wiring pattern which includes first wiring and second wiring, the first wiring and the second wiring disposed separately so as to be flush with each other, and the first wiring and the second wiring being fixed at a mutually different potential, an uppermost interlayer film disposed on the lower layer wiring pattern, a titanium nitride layer disposed on the uppermost interlayer film so as to cover the first wiring and the second wiring, and the titanium nitride having the thickness of 800 Å or more, and a pad metal disposed on the titanium nitride layer.
Public/Granted literature
- US20140091464A1 SEMICONDUCTOR DEVICE Public/Granted day:2014-04-03
Information query
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