Invention Grant
- Patent Title: SOC design with critical technology pitch alignment
- Patent Title (中): SOC设计与关键技术音调对齐
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Application No.: US14338229Application Date: 2014-07-22
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Publication No.: US09331016B2Publication Date: 2016-05-03
- Inventor: Xiangdong Chen , Ohsang Kwon , Esin Terzioglu , Hadi Bunnalim
- Applicant: QUALCOMM Incorporated
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM Incorporated
- Current Assignee: QUALCOMM Incorporated
- Current Assignee Address: US CA San Diego
- Agency: Arent Fox LLP
- Main IPC: H01L29/40
- IPC: H01L29/40 ; H01L23/522 ; H01L27/02 ; H01L23/528
Abstract:
An SOC apparatus includes a plurality of gate interconnects with a minimum pitch g, a plurality of metal interconnects with a minimum pitch m, and a plurality of vias interconnecting the gate interconnects and the metal interconnects. The vias have a minimum pitch v. The values m, g, and v are such that g2+m2≧v2 and an LCM of g and m is less than 20 g. The SOC apparatus may further include a second plurality of metal interconnects with a minimum pitch of m2, where m2>m and the LCM of g, m, and m2 is less than 20 g.
Public/Granted literature
- US20150028495A1 SOC DESIGN WITH CRITICAL TECHNOLOGY PITCH ALIGNMENT Public/Granted day:2015-01-29
Information query
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