Invention Grant
- Patent Title: Bonding structure of bonding wire
- Patent Title (中): 接合线的接合结构
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Application No.: US12866797Application Date: 2009-07-10
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Publication No.: US09331049B2Publication Date: 2016-05-03
- Inventor: Tomohiro Uno , Takashi Yamada , Atsuo Ikeda
- Applicant: Tomohiro Uno , Takashi Yamada , Atsuo Ikeda
- Applicant Address: JP Tokyo
- Assignee: NIPPON STEEL & SUMIKIN MATERIALS CO., LTD.
- Current Assignee: NIPPON STEEL & SUMIKIN MATERIALS CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Troutman Sanders LLP
- Priority: JP2008-181813 20080711
- International Application: PCT/JP2009/062635 WO 20090710
- International Announcement: WO2010/005086 WO 20100114
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/00

Abstract:
The invention is aimed at providing a bonding structure of a copper-based bonding wire, realizing low material cost, high productivity in a continuous bonding in reverse bonding for wedge bonding on bumps, as well as excellent reliability in high-temperature heating, thermal cycle test, reflow test, HAST test or the like. The bonding structure is for connecting the bonding wire onto a ball bump formed on an electrode of a semiconductor device, the bonding wire and the ball bump respectively containing copper as a major component thereof. The bonding structure comprises a concentrated layer A provided at an interface of a bonding part of the ball bump and the bonding wire, wherein the concentration of a metal R other than copper in the concentrated layer A is not less than ten times the average concentration of the metal R in the ball bump; and a concentrated layer B provided at an interface of a bonding part of the ball bump and the electrode, wherein the concentration of the metal R in the concentrated layer B is not less than ten times the average concentration of the metal R in the ball bump.
Public/Granted literature
- US20110104510A1 BONDING STRUCTURE OF BONDING WIRE Public/Granted day:2011-05-05
Information query
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