Invention Grant
US09331090B2 Compact three dimensional vertical NAND and method of making thereof 有权
紧凑型三维垂直NAND及其制作方法

Compact three dimensional vertical NAND and method of making thereof
Abstract:
A NAND device has at least a 3×3 array of vertical NAND strings in which the control gate electrodes are continuous in the array and do not have an air gap or a dielectric filled trench in the array. The NAND device is formed by first forming a lower select gate level having separated lower select gates, then forming plural memory device levels containing a plurality of NAND string portions, and then forming an upper select gate level over the memory device levels having separated upper select gates.
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