Invention Grant
- Patent Title: Pixel structure and fabrication method thereof
- Patent Title (中): 像素结构及其制造方法
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Application No.: US14221262Application Date: 2014-03-20
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Publication No.: US09331106B2Publication Date: 2016-05-03
- Inventor: Wei-Hao Tseng , Fan-Wei Chang , Shou-Wei Fang , Hong-Syu Chen , Jen-Yu Lee , Tsung-Hsiang Shih , Hung-Che Ting
- Applicant: Au Optronics Corporation
- Applicant Address: TW Hsinchu
- Assignee: Au Optronics Corporation
- Current Assignee: Au Optronics Corporation
- Current Assignee Address: TW Hsinchu
- Agency: Jianq Chyun IP Office
- Priority: TW102140317A 20131106
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/66 ; H01L29/423 ; H01L29/417

Abstract:
A fabrication method of a pixel structure includes the following steps. A first metal layer is patterned to form a source electrode and a drain electrode. A semiconductor material layer is patterned to form a channel layer and a pixel pattern. A first insulation layer is formed to cover the channel layer, the source electrode, the drain electrode and the pixel pattern. A gate electrode is formed on the first insulation layer located above the channel layer. A second insulation layer is formed to cover the gate electrode and the first insulation layer. A pixel opening is formed in the first insulation layer and the second insulation layer to expose a partial region of the pixel pattern. The partial region of the pixel pattern exposed by the pixel opening is modified so as to form a pixel electrode electrically connected to the drain electrode.
Public/Granted literature
- US20150123111A1 PIXEL STRUCTURE AND FABRICATION METHOD THEREOF Public/Granted day:2015-05-07
Information query
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