Invention Grant
US09331137B1 Metal-insulator-metal capacitors between metal interconnect layers
有权
金属互连层之间的金属 - 绝缘体 - 金属电容器
- Patent Title: Metal-insulator-metal capacitors between metal interconnect layers
- Patent Title (中): 金属互连层之间的金属 - 绝缘体 - 金属电容器
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Application No.: US13431818Application Date: 2012-03-27
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Publication No.: US09331137B1Publication Date: 2016-05-03
- Inventor: Deepa Ratakonda , Peter Smeys , Shuxian Chen , Girish Venkitachalam
- Applicant: Deepa Ratakonda , Peter Smeys , Shuxian Chen , Girish Venkitachalam
- Applicant Address: US CA San Jose
- Assignee: Altera Corporation
- Current Assignee: Altera Corporation
- Current Assignee Address: US CA San Jose
- Agency: Treyz Law Group, P.C.
- Agent Jason Tsai
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L49/02 ; H01L27/108

Abstract:
An integrated circuit may include interconnects formed from alternating metal interconnect layers and inter-metal dielectric layers. A metal-insulator-metal capacitor may be formed within a selected inter-metal dielectric layer. The metal-insulator-metal capacitor may include first and second capacitor electrodes. The first capacitor electrode may contact a first conductive interconnect line in an underlying metal interconnect layer. The second capacitor electrode may overlap the first capacitor electrode and a portion of a second conductive interconnect line in the underlying metal layer. A via may be formed between the underlying metal interconnect layer and an additional metal interconnect layer. The via may simultaneously contact the second capacitor electrode and the second conductive interconnect line.
Information query
IPC分类: