Invention Grant
- Patent Title: Semiconductor device having storage electrode and manufacturing method thereof
- Patent Title (中): 具有存储电极的半导体器件及其制造方法
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Application No.: US14265254Application Date: 2014-04-29
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Publication No.: US09331138B2Publication Date: 2016-05-03
- Inventor: Takashi Miyajima
- Applicant: PS4 Luxco S.a.r.l.
- Applicant Address: LU Luxembourg
- Assignee: PS4 LUXCO S.A.R.L.
- Current Assignee: PS4 LUXCO S.A.R.L.
- Current Assignee Address: LU Luxembourg
- Agency: Kunzler Law Group
- Priority: JP2008-193389 20080728
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L49/02 ; H01L27/06 ; H01L21/768 ; H01L23/532

Abstract:
A semiconductor device includes a first storage electrode, a second storage electrode that is arranged above the first storage electrode, a first landing pad that is arranged between a top surface of the first storage electrode and a bottom surface of the second storage electrode, the first landing pad connecting the first storage electrode and the second storage electrode, the first landing pad having a first landing surface, the first landing surface being larger than the bottom surface of the second storage electrode, and the second storage electrode being placed on the first landing surface, a capacitive insulating film that is laminated on the first and second storage electrodes and on an outer circumferential surface of the first landing pad, and a plate electrode that contacts the capacitive insulating film.
Public/Granted literature
- US20140231959A1 SEMICONDUCTOR DEVICE HAVING STORAGE ELECTRODE AND MANUFACTURING METHOD THEREOF Public/Granted day:2014-08-21
Information query
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