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US09331159B1 Fabricating transistor(s) with raised active regions having angled upper surfaces 有权
制造具有凸起的有源区域的晶体管具有成角度的上表面

Fabricating transistor(s) with raised active regions having angled upper surfaces
Abstract:
Methods of fabricating transistors having raised active region(s) with at least partially angled upper surfaces are provided. The method includes, for instance: providing a gate structure disposed over a substrate, the gate structure including a conformal spacer layer; forming a raised active region adjoining a sidewall of the conformal spacer layer; providing a protective material over the raised active region; selectively etching-back the sidewall of the conformal spacer layer, exposing a side portion of the raised active region below the protective material; and etching the exposed side portion of the raised active region to partially undercut the protective material, wherein the etching facilitates defining, at least in part, an at least partially angled upper surface of the raised active region of the transistor.
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