Invention Grant
US09331159B1 Fabricating transistor(s) with raised active regions having angled upper surfaces
有权
制造具有凸起的有源区域的晶体管具有成角度的上表面
- Patent Title: Fabricating transistor(s) with raised active regions having angled upper surfaces
- Patent Title (中): 制造具有凸起的有源区域的晶体管具有成角度的上表面
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Application No.: US14615470Application Date: 2015-02-06
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Publication No.: US09331159B1Publication Date: 2016-05-03
- Inventor: Ashish Kumar Jha , Yan Ping Shen , Wei Hua Tong , Haiting Wang , Min-Hwa Chi
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Heslin Rothenberg Farley and Mesiti PC
- Agent Nicholas Mesiti
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L21/8234 ; H01L29/417 ; H01L29/66 ; H01L21/311 ; H01L21/306 ; H01L21/02 ; H01L29/04 ; H01L29/08 ; H01L29/78

Abstract:
Methods of fabricating transistors having raised active region(s) with at least partially angled upper surfaces are provided. The method includes, for instance: providing a gate structure disposed over a substrate, the gate structure including a conformal spacer layer; forming a raised active region adjoining a sidewall of the conformal spacer layer; providing a protective material over the raised active region; selectively etching-back the sidewall of the conformal spacer layer, exposing a side portion of the raised active region below the protective material; and etching the exposed side portion of the raised active region to partially undercut the protective material, wherein the etching facilitates defining, at least in part, an at least partially angled upper surface of the raised active region of the transistor.
Information query
IPC分类: