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US09331181B2 Nanodot enhanced hybrid floating gate for non-volatile memory devices 有权
用于非易失性存储器件的Nanodot增强型混合浮动栅极

Nanodot enhanced hybrid floating gate for non-volatile memory devices
Abstract:
A memory device and a method of making a memory device that includes a semiconductor channel, a tunnel dielectric layer located over the semiconductor channel, a floating gate located over the tunnel dielectric layer, the floating gate comprising a continuous layer of an electrically conductive material and at least one protrusion of an electrically conductive material facing the tunnel dielectric layer and electrically shorted to the continuous layer, a blocking dielectric region located over the floating gate, and a control gate located over the blocking dielectric layer.
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