Invention Grant
US09331182B2 Semiconductor devices with a gate conductor formed as a spacer, and methods for manufacturing the same
有权
具有形成为间隔物的栅极导体的半导体器件及其制造方法
- Patent Title: Semiconductor devices with a gate conductor formed as a spacer, and methods for manufacturing the same
- Patent Title (中): 具有形成为间隔物的栅极导体的半导体器件及其制造方法
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Application No.: US14151441Application Date: 2014-01-09
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Publication No.: US09331182B2Publication Date: 2016-05-03
- Inventor: Huilong Zhu , Qingqing Liang , Huicai Zhong
- Applicant: Institute of Microelectronics, Chinese Academy of Sciences
- Applicant Address: CN Beijing
- Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee Address: CN Beijing
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Priority: CN201210441393 20121107
- Main IPC: H01L29/788
- IPC: H01L29/788 ; H01L29/66 ; H01L21/28 ; H01L29/423

Abstract:
Semiconductor devices and methods for manufacturing the same are disclosed. In one aspect, the method comprises forming a first shielding layer on a substrate, and forming one of source and drain regions with the first shielding layer as a mask. Then, forming a second shielding layer on the substrate, and forming the other of the source and drain regions with the second shielding layer as a mask. Then, removing a portion of the second shielding layer which is next to the other of the source and drain regions. Lastly, forming a first gate dielectric layer, a floating gate layer, and a second gate dielectric layer, and forming a gate conductor as a spacer on a sidewall of a remaining portion of the second shielding layer.
Public/Granted literature
- US20140124847A1 SEMICONDUCTOR DEVICES AND METHODS FOR MANUFACTURING THE SAME Public/Granted day:2014-05-08
Information query
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