Invention Grant
- Patent Title: Piezoelectric mechanism having electrodes within thin film sheet that are substantially perpendicular to substrate
- Patent Title (中): 在薄膜片内具有基本上垂直于衬底的电极的压电机构
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Application No.: US13703121Application Date: 2010-06-30
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Publication No.: US09331260B2Publication Date: 2016-05-03
- Inventor: Tony S. Cruz-Uribe , Peter Mardilovich
- Applicant: Tony S. Cruz-Uribe , Peter Mardilovich
- Applicant Address: US TX Houston
- Assignee: Hewlett-Packard Development Company, L.P.
- Current Assignee: Hewlett-Packard Development Company, L.P.
- Current Assignee Address: US TX Houston
- Agent Michael A. Dryja
- International Application: PCT/US2010/040685 WO 20100630
- International Announcement: WO2012/002965 WO 20120105
- Main IPC: H01L41/22
- IPC: H01L41/22 ; H01L41/047 ; B41J2/14 ; B41J2/16 ; H01L41/09 ; H01L41/29 ; B05B17/06 ; H01L41/257

Abstract:
A piezoelectric actuator is formed by forming first and second electrodes on a substrate, and depositing a material on the substrate and between side surfaces of adjacent first and second electrodes to form a thin film sheet within which the first and the second electrodes extend from a first surface of the thin film sheet towards a second surface of the thin film sheet opposite the first surface. The second electrode is interdigitated in relation to the first electrode. The side surfaces of the first and the second electrodes are at least substantially perpendicular to the substrate. The thin film sheet is to physically deform in response to an electric field induced within the thin film sheet via application of a voltage across the first and the second electrodes.
Public/Granted literature
Information query
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