Invention Grant
- Patent Title: Piezoelectric element
- Patent Title (中): 压电元件
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Application No.: US14057738Application Date: 2013-10-18
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Publication No.: US09331261B2Publication Date: 2016-05-03
- Inventor: Takashi Kubo , Toshinari Noda
- Applicant: PANASONIC CORPORATION
- Applicant Address: JP Osaka
- Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2012-269053 20121210
- Main IPC: H01L41/047
- IPC: H01L41/047 ; H01L41/187 ; H01L41/08

Abstract:
A piezoelectric element includes, in sequence, a substrate containing metallic material; a first intermediate layer; a lower electrode layer; a piezoelectric layer; and an upper electrode layer. The first intermediate layer contains, as a main component, a nitrogen-containing silicon oxide having a silicon-nitrogen bond. The lower electrode layer contains a perovskite-type oxide in (100) preferential orientation. The piezoelectric layer contains a perovskite-type oxide in (001) or (100) preferential orientation.
Public/Granted literature
- US20140159549A1 PIEZOELECTRIC ELEMENT Public/Granted day:2014-06-12
Information query
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