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US09331261B2 Piezoelectric element 有权
压电元件

Piezoelectric element
Abstract:
A piezoelectric element includes, in sequence, a substrate containing metallic material; a first intermediate layer; a lower electrode layer; a piezoelectric layer; and an upper electrode layer. The first intermediate layer contains, as a main component, a nitrogen-containing silicon oxide having a silicon-nitrogen bond. The lower electrode layer contains a perovskite-type oxide in (100) preferential orientation. The piezoelectric layer contains a perovskite-type oxide in (001) or (100) preferential orientation.
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