Invention Grant
US09331263B2 Piezoelectric motor, drive unit, electronic part transfer apparatus, electronic part inspection apparatus, robot, and printer 有权
压电电机,驱动单元,电子部件传送装置,电子部件检查装置,机器人和打印机

Piezoelectric motor, drive unit, electronic part transfer apparatus, electronic part inspection apparatus, robot, and printer
Abstract:
A piezoelectric motor includes a piezoelectric element, an oscillating plate including the piezoelectric element, a driving projection provided at an end of the oscillating plate, and a driven member driven by the driving projection coming into abutment therewith and is characterized in that Young's modulus E1 of the driving projection and Young's modulus E2 of the driven member are different.
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