Invention Grant
- Patent Title: Electronic device having buried gate and method for fabricating the same
- Patent Title (中): 具有掩埋栅的电子器件及其制造方法
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Application No.: US14188576Application Date: 2014-02-24
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Publication No.: US09331267B2Publication Date: 2016-05-03
- Inventor: Seok-Pyo Song , Sung-Woong Chung , Jong-Han Shin
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-Si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-Si
- Agency: Perkins Coie LLP
- Priority: KR10-2013-0022793 20130304
- Main IPC: G11C11/00
- IPC: G11C11/00 ; H01L43/02 ; H01L27/22 ; H01L27/24 ; G11C13/00

Abstract:
Electronic devices having semiconductor elements and methods for fabricating such devices including, a method for fabricating an electronic device including a semiconductor memory, which includes: forming a sacrificial layer on a substrate including a first region and a second region; selectively etching the sacrificial layer and the substrate of the first region to form a trench; forming a first gate that fills a part of the trench in the first region; forming a gate protection layer on the first gate to fill the remaining part of the trench; removing the sacrificial layer of the first region to form a grooved portion surrounded by the gate protection layer; forming a conductive plug to cover the grooved portion; removing the sacrificial layer of the second region; and forming a second gate on the substrate of the second region.
Public/Granted literature
- US20140247647A1 ELECTRONIC DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2014-09-04
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