Invention Grant
- Patent Title: Electronic element sealing method and bonded substrate
- Patent Title (中): 电子元件密封方法和键合衬底
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Application No.: US14407721Application Date: 2013-06-14
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Publication No.: US09331305B2Publication Date: 2016-05-03
- Inventor: Tadatomo Suga , Yoshiie Matsumoto
- Applicant: LAN TECHNICAL SERVICE CO., LTD.
- Applicant Address: JP Shinjuku-ku
- Assignee: Lan Technical Service Co., Ltd.
- Current Assignee: Lan Technical Service Co., Ltd.
- Current Assignee Address: JP Shinjuku-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2012-135898 20120615
- International Application: PCT/JP2013/066446 WO 20130614
- International Announcement: WO2013/187500 WO 20131219
- Main IPC: H01L51/52
- IPC: H01L51/52 ; H05B33/04 ; H05B33/10 ; H01L51/56

Abstract:
[Problem] The aim of the invention is to provide a method of sealing an electronic element such as an organic EL element using a normal temperature bonding method that enables bonding at low temperature and in which permeation of external gases such as hydrogen or oxygen through the sealed section (dam) formed by the organic material, or the junction interface of the sealed section and a cover substrate is suppressed. [Solution] A method of sealing an electronic element comprises a step of forming a sealing section by forming a sealing section including an organic material on the surface of a first substrate formed with the electronic element, surrounding this electronic element with a thickness that is larger than that of this electronic element; a step of forming a first inorganic material layer in which a first inorganic material layer is formed at least on the exposed surface of this sealing section; and a substrate bonding step of bonding the first substrate and the second substrate by pushing together the sealing section of the first substrate and the junction location of the second substrate.
Public/Granted literature
- US20150171365A1 ELECTRONIC ELEMENT SEALING METHOD AND BONDED SUBSTRATE Public/Granted day:2015-06-18
Information query
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