Invention Grant
- Patent Title: Method of manufacturing semiconductor laser
- Patent Title (中): 制造半导体激光器的方法
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Application No.: US14446004Application Date: 2014-07-29
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Publication No.: US09331456B2Publication Date: 2016-05-03
- Inventor: Masami Ishiura
- Applicant: Sumitomo Electric Device Innovations, Inc.
- Applicant Address: JP Yokohama-shi
- Assignee: Sumitomo Electric Device Innovations, Inc.
- Current Assignee: Sumitomo Electric Device Innovations, Inc.
- Current Assignee Address: JP Yokohama-shi
- Agency: Venable LLP
- Agent Michael A. Sartori; Tamatane J. Aga
- Priority: JP2013-158314 20130730
- Main IPC: H01S5/00
- IPC: H01S5/00 ; H01L27/15 ; H01S5/32 ; H01S5/227 ; H01S5/30 ; H01S5/343 ; H01S5/22 ; H01L21/02

Abstract:
A method of manufacturing a semiconductor laser according to an aspect of the present invention includes (a) sequentially epitaxially growing a first cladding layer, an active layer and a second cladding layer on a semiconductor substrate composed of InP or GaAs and having a plane index of (100), (b) forming a plurality of growth start surfaces having a plane index greater than (100) in an upper surface of the second cladding layer, and (c) epitaxially growing a third cladding layer containing zinc in the plurality of growth start surfaces of the second cladding layer.
Public/Granted literature
- US20150037919A1 METHOD OF MANUFACTURING SEMICONDUCTOR LASER Public/Granted day:2015-02-05
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