Invention Grant
- Patent Title: Vibrator, oscillator, electronic device, and moving object
- Patent Title (中): 振动器，振荡器，电子设备和移动物体
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Application No.: US14513594Application Date: 2014-10-14
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Publication No.: US09331602B2Publication Date: 2016-05-03
- Inventor: Kazuyuki Nagata , Ryuji Kihara
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2013-214422 20131015
- Main IPC: H03B5/30
- IPC: H03B5/30 ; H01L41/053 ; H01L41/083 ; H03H9/24 ; H02N1/00 ; H01L41/09 ; H03H9/02
Abstract:
A MEMS vibrator includes: a substrate; a base portion which is disposed on the substrate; and a plurality of vibration portions which extends in a direction that intersects with a normal line of the substrate from the base portion. In a planar view, when a length of the vibration portion in a direction in which the vibration portion extends from the base portion is L, and a length of the vibration portion in a direction that intersects with a direction in which the vibration portion extends from the base portion is W, a dimension ratio (L/W) of the vibration portion satisfies a relationship in which 0.2≦(L/W)≦7.0.
Public/Granted literature
- US20150102865A1 VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND MOVING OBJECT Public/Granted day:2015-04-16
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