Invention Grant
US09331605B2 Lower electrode for piezoelectric element, and piezoelectric element provided with lower electrode
有权
用于压电元件的下电极，以及设置有下电极的压电元件
- Patent Title: Lower electrode for piezoelectric element, and piezoelectric element provided with lower electrode
- Patent Title (中): 用于压电元件的下电极，以及设置有下电极的压电元件
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Application No.: US14119779Application Date: 2012-05-09
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Publication No.: US09331605B2Publication Date: 2016-05-03
- Inventor: Kazuki Shibuya
- Applicant: Kazuki Shibuya
- Applicant Address: JP Tokyo
- Assignee: KONICA MINOLTA, INC.
- Current Assignee: KONICA MINOLTA, INC.
- Current Assignee Address: JP Tokyo
- Agency: Cozen O'Connor
- Priority: JP2011-114295 20110523
- International Application: PCT/JP2012/061855 WO 20120509
- International Announcement: WO2012/160972 WO 20121129
- Main IPC: H01L41/047
- IPC: H01L41/047 ; H02N2/00 ; H01L41/29 ; H01L41/319 ; H01L41/08
Abstract:
In the present invention, a half-value width of a rocking curve, an average roughness of a surface, and an average grain diameter are all specified at one time with respect to a Pt layer that constitutes a lower electrode for a piezoelectric element, thereby stably film-forming the Pt layer having excellent characteristics, and stably forming, on the Pt layer, a piezoelectric thin film having excellent characteristics.
Public/Granted literature
- US20140084753A1 Lower Electrode For Piezoelectric Element, And Piezoelectric Element Provided With Lower Electrode Public/Granted day:2014-03-27
Information query
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