Invention Grant
US09332166B2 Imaging apparatus equipped with illumination optical system having a plurality of optical integrators that guide light 有权
配备有具有引导光的多个光学积分器的照明光学系统的成像设备

Imaging apparatus equipped with illumination optical system having a plurality of optical integrators that guide light
Abstract:
An imaging apparatus (1) includes an illumination optical system (100) that includes a light source (110) and is configured to guide light from the light source to a target(B), an imaging optical system configured to capture an image of the target, and a plurality of image sensors (430) arranged on an image plane of the imaging optical system. The illumination optical system includes a plurality of integrators (121,122). Light flux exits from one of the plurality of integrators illuminates at least one of the plurality of image sensors, and light exits from the other integrators illuminates at least one of the plurality of image sensors other than the image sensor illuminated by the light exits from the one of the plurality of integrators.
Public/Granted literature
Information query
Patent Agency Ranking
0/0