A lower supporting pin module 22 is given a shape having a contact surface 26a. On the occasion of position recognition for determining a position of a pin on the lower supporting pin module 22, an image of the lower supporting pin module 22 is captured, and the image is subjected to recognition processing, to thus detect an outer shape of an upper shaft 24B. Even when an extraneous matter on a downside surface of a substrate adheres to the contact surface 26a, the position of the lower supporting pin module 22 can be stably recognized with superior recognition precision.