Invention Grant
US09333598B2 Method of making a nozzle 有权
制作喷嘴的方法

Method of making a nozzle
Abstract:
A method of fabricating a nozzle that includes providing a first material capable of undergoing multiphoton reaction; forming a first microstructured pattern in the first material using a multiphoton process; replicating the first microstructured pattern in a second material to make a first mold comprising a second microstructured pattern in the second material; replicating the second microstructured pattern in a third material to make a second mold comprising a third microstructured pattern comprising microstructures in the third material; replicating the third microstructured pattern in a fourth material to make a replicated structure; planarizing the replicated structure to expose tops of the microstructures in the plurality of microstructures in the third microstructured pattern; and removing the third material resulting in the nozzle having a plurality of holes in the fourth material.
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