Invention Grant
US09333600B2 Method for tensioning vapor deposition mask using an alignment master glass
有权
使用对准主玻璃张紧气相沉积掩模的方法
- Patent Title: Method for tensioning vapor deposition mask using an alignment master glass
- Patent Title (中): 使用对准主玻璃张紧气相沉积掩模的方法
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Application No.: US14506136Application Date: 2014-10-03
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Publication No.: US09333600B2Publication Date: 2016-05-10
- Inventor: Sang-Shin Lee
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin, Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin, Gyeonggi-Do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2011-0001077 20110105
- Main IPC: B05D5/06
- IPC: B05D5/06 ; B23P17/00 ; H01L51/00 ; H01L51/56 ; G01B11/02 ; C23C14/04
Abstract:
An alignment master glass for aligning a plurality of openings of a vapor deposition mask for tensioning the vapor deposition mask, the alignment master glass includes a transparent substrate, and reflective film patterns on at least one surface of the transparent substrate, the reflective film patterns being only at locations corresponding to the plurality of openings of the vapor deposition mask.
Public/Granted literature
- US20150052724A1 METHOD FOR TENSIONING VAPOR DEPOSITION MASK USING AN ALIGNMENT MASTER GLASS Public/Granted day:2015-02-26
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