Invention Grant
- Patent Title: Method for adjusting height position of polishing head and method for polishing workpiece
- Patent Title (中): 抛光头高度位置调整方法及抛光工件方法
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Application No.: US14112084Application Date: 2012-04-25
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Publication No.: US09333618B2Publication Date: 2016-05-10
- Inventor: Takashi Aratani
- Applicant: Takashi Aratani
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2011-118744 20110527
- International Application: PCT/JP2012/002826 WO 20120425
- International Announcement: WO2012/164820 WO 20121206
- Main IPC: B24B49/16
- IPC: B24B49/16 ; B24B37/04 ; B24B37/005 ; B24B37/10 ; B24B49/10 ; B24B37/30 ; B24B49/12 ; H01L21/02

Abstract:
A method for adjusting a height position of a polishing head, comprising moving the polishing head to a height position at which the polishing head comes in noncontact with the polishing pad with the polishing head holding no workpiece, and then rotating at least one of the polishing head and the turn table; measuring the load torque current of the at least one of the polishing head and the turn table rotated with the torque-measuring mechanism while the height-adjusting mechanism moves the polishing head toward the polishing pad until the polishing head contacts the polishing pad, and recording the height position of the polishing head as a reference position when a variation in the measured load torque current exceeds a threshold; and adjusting the height position of the polishing head to the predetermined position on the basis of a distance from the reference position.
Public/Granted literature
- US20140030957A1 METHOD FOR ADJUSTING HEIGHT POSITION OF POLISHING HEAD AND METHOD FOR POLISHING WORKPIECE Public/Granted day:2014-01-30
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