Invention Grant
US09333620B2 Chemical mechanical polishing pad with clear endpoint detection window
有权
化学机械抛光垫具有清晰的端点检测窗口
- Patent Title: Chemical mechanical polishing pad with clear endpoint detection window
- Patent Title (中): 化学机械抛光垫具有清晰的端点检测窗口
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Application No.: US14264576Application Date: 2014-04-29
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Publication No.: US09333620B2Publication Date: 2016-05-10
- Inventor: Bainian Qian , Marty W. DeGroot
- Applicant: Rohm and Haas Electronic Materials CMP Holdings, Inc. , Dow Global Technologies LLC
- Applicant Address: US DE Newark US MI Midland
- Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.,Dow Global Technologies LLC
- Current Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.,Dow Global Technologies LLC
- Current Assignee Address: US DE Newark US MI Midland
- Agent Thomas S. Deibert
- Main IPC: B24B37/20
- IPC: B24B37/20 ; B24B37/013 ; B24B37/24 ; B24B49/12 ; H01L21/306

Abstract:
A chemical mechanical polishing pad is provided containing a polishing layer having a polishing surface; and, an endpoint detection window; wherein the endpoint detection window comprises a reaction product of ingredients, comprising: an isocyanate terminated urethane prepolymer having 5.5 to 9.5 wt % unreacted NCO groups, wherein the isocyanate terminated urethane prepolymer is a reaction product of ingredients comprising: an aliphatic polyfunctional isocyanate; and, a prepolymer polyol; and, a curative system, comprising: 0 to 99 wt % of a difunctional curative; and, 1 to 100 wt % of an amine initiated polyol curative having at least one nitrogen atom per molecule and an average of at least three hydroxyl groups per molecule. Also provide are methods of making and using the chemical mechanical polishing pad.
Public/Granted literature
- US20150306730A1 CHEMICAL MECHANICAL POLISHING PAD WITH CLEAR ENDPOINT DETECTION WINDOW Public/Granted day:2015-10-29
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