Invention Grant
- Patent Title: Abradable silicone elastomer compound and use thereof
- Patent Title (中): 可磨性硅氧烷弹性体化合物及其用途
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Application No.: US14443325Application Date: 2013-10-22
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Publication No.: US09334435B2Publication Date: 2016-05-10
- Inventor: Andreas Koellnberger
- Applicant: Wacker Chemie AG
- Applicant Address: DE Munich
- Assignee: WACKER CHEMIE AG
- Current Assignee: WACKER CHEMIE AG
- Current Assignee Address: DE Munich
- Agency: Brooks Kushman P.C.
- Priority: DE102012220954 20121116
- International Application: PCT/EP2013/072096 WO 20131022
- International Announcement: WO2014/075879 WO 20140522
- Main IPC: H01L21/00
- IPC: H01L21/00 ; C09J183/04 ; H01L23/00 ; C08G77/12 ; C08L83/04 ; G02B1/04
Abstract:
Addition curing silicone elastomers of high Shore D hardness are grindable and polishable, and are particularly useful as temporary adhesives in the processing of semiconductor wafers.
Public/Granted literature
- US20150299533A1 ABRADABLE SILICONE ELASTOMER COMPOUND AND USE THEREOF Public/Granted day:2015-10-22
Information query
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