Invention Grant
- Patent Title: Cleaning liquid composition for electronic device
- Patent Title (中): 电子设备清洗液组合物
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Application No.: US13705575Application Date: 2012-12-05
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Publication No.: US09334470B2Publication Date: 2016-05-10
- Inventor: Yumiko Taniguchi , Kikue Morita , Chiyoko Horike , Takuo Ohwada
- Applicant: Kanto Kagaku Kabushiki Kaisha
- Applicant Address: JP Tokyo
- Assignee: KANTO KAGAKU KABUSHIKI KAISHA
- Current Assignee: KANTO KAGAKU KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Hauptman Ham, LLP
- Priority: JP2011-267368 20111206
- Main IPC: C11D7/32
- IPC: C11D7/32 ; C11D7/36 ; C11D11/00 ; C23G1/18 ; C23G1/20 ; H01L21/02 ; C11D3/30 ; C11D3/36

Abstract:
[Purpose]To provide a cleaning liquid composition that has excellent removability for metallic impurities and particulates, does not cause corrosion of Cu, and can clean a semiconductor substrate having copper wiring in a production process for an electronic device such as a semiconductor device.[Solution means]A cleaning liquid composition for cleaning a semiconductor substrate having copper wiring, the cleaning liquid composition containing one or more types of basic compound containing no metal, and one or more types of phosphonic acid-based chelating agent, and having a hydrogen ion concentration (pH) of 8 to 10.
Public/Granted literature
- US20130143785A1 CLEANING LIQUID COMPOSITION FOR ELECTRONIC DEVICE Public/Granted day:2013-06-06
Information query